>From: Guy Haché
>Reply-To: General MEMS discussion
>To: [email protected]
>Subject: [mems-talk] evaporation of nickel on nitride
>Date: Tue, 2 Mar 2004 15:01:54 -0500
>
>Hi,
>
>We want to evaporate Nickel on Nitride (vacuum of 10-5 before evaporation),
>but
>we have some problems with adhesion. When we do the lift-off, the nickel
>doesn't stick. So my first question would be, is Nickel suppose to stick
>to
>Nitride? If so, how could I have better adherence?
>
>Thank's
>
>Guy Haché, M.Sc.A.
>Assistant de recherche, research assistant
Hi Guy
Evaporating a 100-200 A chrome layer should provide you with the adhesion
you require.
Phil Tabada
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