Hi, i ve just etch Ni on Si (0.7µm evap) and then the Ni did'nt stick,
because 0.7µ it's too much in an evap process.
I don't your thickness of Ni, but if it's similar to 0.7µ? It will probably
not work.

-----Message d'origine-----
De : Guy Haché [mailto:[email protected]]
Envoyé : mardi 2 mars 2004 21:02
À : [email protected]
Objet : [mems-talk] evaporation of nickel on nitride


Hi,

We want to evaporate Nickel on Nitride (vacuum of 10-5 before evaporation),
but
we have some problems with adhesion.  When we do the lift-off, the nickel
doesn't stick.  So my first question would be, is Nickel suppose to stick to

Nitride?  If so, how could I have better adherence?

Thank's

Guy Haché, M.Sc.A.
Assistant de recherche, research assistant
--------------------------------------------------------
Département de génie électrique et de génie informatique
Université de Sherbrooke
2500, boulevard Université
Sherbrooke (Québec) Canada
J1K 2R1
Téléphone/phone : (819) 821-8000 3772
Télécopieur/fax : (819) 821-7937
e-mail: [email protected]
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