A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Problems with RF Sputtering of PZT
Problems with RF Sputtering of PZT
2004-03-09
S. S. Abhishek
2004-03-10
Gary
Problems with RF Sputtering of PZT
S. S. Abhishek
2004-03-09
Hello everyone,

I am going to RF Sputter lead-zirconate-titanate (PZT)
onto platinized Si substrates. The problem I am having
is of Pb contamination, and so the cleanroom staff
here is very reluctant to allow any Pb inside. They
are afraid that Pb will be poisonous to users in the
clean room. Has anyone faced a similar problem before?
If so, please help me out here.

Thanks.

Abhishek Sivapurapu,
791 Atlantic Drive,
MiRC, Georgia Tech,
Atlanta, GA 30332

________________________________________________________________________
Yahoo! India Insurance Special: Be informed on the best policies, services,
tools and more.
Go to: http://in.insurance.yahoo.com/licspecial/index.html


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Addison Engineering
Harrick Plasma, Inc.
Nano-Master, Inc.