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MEMSnet Home: MEMS-Talk: MicroChem LOR Lift-off resist
MicroChem LOR Lift-off resist
2004-03-11
Dr. Sanjay Vijendran
2004-03-11
William Lanford-Crick
2004-03-12
Bill Moffat
MicroChem LOR Lift-off resist
Dr. Sanjay Vijendran
2004-03-11
All,

 Does anyone have any experience using LOR with Shipley 1800 series as the
imaging resist for lift-off metallization? I have been evaluating the LOR B
resist and find that the undercut rates I get are much higher (up to 4
times) than that shown in the datasheet. I have been using exactly the same
processing conditions as specified  but can't reproduce the rates that are
shown in the datasheet.

 I'd appreciate any comments from LOR users about this.

Thanks,
Sanjay



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