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MEMSnet Home: MEMS-Talk: anisotropic ITO dry etch
anisotropic ITO dry etch
Ni dry etch
2004-03-12
Yuzhu Li
2004-03-12
Yuzhu Li
anisotropic ITO dry etch
Yuzhu Li
2004-03-12
Hi, I need to anisotropicly dry etch 1000A ITO with ICP etcher, any
suggestion on gas and recipies?
reply
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