For anisotropic Pyrex etch use SF6 RIE. It's a bit slow, but ~5 microns
is easy to achieve in a capacitivly coupled etcher using a metal mask.
Etching Pyrex to a depth of several hundred microns has been achieved
with ICP systems.

Roger Shile

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
[email protected]
Sent: Sunday, March 14, 2004 4:23 PM
To: [email protected]
Subject: [mems-talk] Anisotropic etching in Pyrex glass

Hi,

Please let me know if anisotropic etching is possible in Pyrex glass and
if
so, what is the technique ?

Thanks.


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