Dear all,

Thanks for all the valuable suggestions. But I have to etch 150 um down the
Pyrex glass, does the techniques mentioned in the mails work for such a
deep trench also ?

Waiting for your suggestions.

Abhishek

On Mon, 15 Mar 2004 09:24:45 -0800 "Shile" wrote:

> For anisotropic Pyrex etch use SF6 RIE. It's a bit slow, but ~5 microns
> is easy to achieve in a capacitivly coupled etcher using a metal mask.
> Etching Pyrex to a depth of several hundred microns has been achieved
> with ICP systems.
>
> Roger Shile
>
> -----Original Message-----
> From: [email protected]
> [mailto:[email protected]] On Behalf Of
> [email protected]
> Sent: Sunday, March 14, 2004 4:23 PM
> To: [email protected]
> Subject: [mems-talk] Anisotropic etching in Pyrex glass
>
> Hi,
>
> Please let me know if anisotropic etching is possible in Pyrex glass and
> if
> so, what is the technique ?
>
> Thanks.
>
>
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