Shaurya Prakash
Graduate Research Assistant
Department of Mechanical & Industrial Engineering
University of Illinois at Urbana-Champaign
Phone: (217) 265-0753
Fax: (217) 244-6534


Could someone suggest where I can find some information on wet etching of
tantalum pentoxide (Ta2O5)? If someone has some experience in wet etching of
Ta2O5 I would very much appreciate your insight in the matter.

Thank you.
- Shaurya.