A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Metal Spitting
Metal Spitting
2004-03-18
J W
2004-03-18
Brent Garber (2 parts)
2004-03-18
newman
2004-03-26
Jeff Simkins [simkinjr]
2004-03-26
Buncick, Milan (Contractor-AEgis TG)
2004-03-28
[email protected]
Metal Spitting
Brent Garber
2004-03-18
JW,

Try slower ramping to your soak power (just to the melting point), then a
slower ramp to your pre-dep power that should be set 1 or 2% lower than dep
power.  I have a dual shutter system that I open my lower shutter for 100A
for the system to settle before the upper shutter opens.  I need a very
accurate film thickness.
Be sure you have melted in your new Au slowly and completely before trying
the above.  I too have blown all my Au out of the pocket, but that was back
in the 80's.

Brent

J W wrote:

> Hi,
>
> I'm trying to deposit gold using Ebeam evaporation,
> but kept having metal spitting problems.  I tried to
> change the equipment running conditions like longer
> soak time, soak power close to deposition power,
> altering beam sweeping pattern.  Sometime it improves
> and other time it doesn't.  Are there any other
> factors that needs to be considered to get rid of the
> spitting?
>
> Thanks!
> J.W.
>
> __________________________________
> Do you Yahoo!?
> Yahoo! Mail - More reliable, more storage, less spam
> http://mail.yahoo.com
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/
garber.vcf (text/x-vcard, 344 bytes)
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.
Nano-Master, Inc.