Hi all,
We ( Nuclear Microscopy Group, NUS, Singapore) are currently working
on a LIGA-like process that uses a focussed 2 Mev proton beam to
direct write structures in PMMA. We were able to make 60 micron deep
structures (eg walls, letters) with 1-2 micron width. We did this
using bulk pmma. We are now looking for pmma on a substrate, eg Si or
some metal, with thickness in the range from 10 to 60 microns, 20
microns woud be ideal. Is there a commercial a source for such
material? Is it (maybe) easy to make? We are no experts in this.
Spin-coating seems to be the process to use. Any advice?
Thanks in advance.
cheers
Thomas Osipowicz