Nagarajan,

We've actually been pretty successful in coating a pretty wide array of
topographical structures (including cylinders) through the use of spray coating.
The link belw contains additional information regarding the spray coating
process:

http://www.micromagazine.com/archive/04/03/brubaker.html



Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   [email protected] [mailto:mems-talk-
[email protected]]  On Behalf Of Nagarajan
Sent:   Tuesday, March 23, 2004 10:36 AM
To:     [email protected]
Subject:        [mems-talk] Polymer deposition???

Dear all,

Iam nagarajan, doing Masters in mechanical Engg in concordia univ, montreal. Iam
in the process of developing a fabrication process for a piezoelectric tactile
sensor.

 The sensor design is like this....

It consists of a PVDF material embedded between two silicon layers. There are
two cylinders over the substrate, one surrounding the other. The inner cylinder
is made of a rigid material and the outer one of a soft material. Iam planning
to use polysilicon for the inner cylinder and a polymer for(PMMA,polyimide) the
outer one.

Has anyone previously tried polymer deposition and patterning it to cylindrical
shape.Can anyone help me in this regard to how can a polymer be deposited and
patterend into cylindrical form, with the inner cylinder being a polysilicon.

Thanking you all in advance,

Regards




NAGARAJAN N.B
1845,de MAISSONNEUVE WEST
APARTMENT NO 21
MONTREAL,QUEBEC
CANADA - H3H1J9
PH NO- 001-514-937 8454

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