Megan,

A couple of good starts:

http://www.microchem.com/products/su_eight.htm

http://aveclafaux.freeservers.com/SU-8.html


Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   [email protected] [mailto:mems-talk-
[email protected]]  On Behalf Of Megan Moran
Sent:   Tuesday, March 23, 2004 9:10 PM
To:     [email protected]
Subject:        [mems-talk] SU-8 5 Spinning Information

Hello,

My name is Megan and I'm a college student doing a research project
involving photo-lithography.  I need to spin layers of SU-8 5 onto silicone
dioxide.  The SU-8 layers need to be 1, 4, 5, 10 and 20 micrometers
thick.  Can anyone provide me with (or point me in the direction of)
information about spin speeds and times to get the desired thicknesses?

Also, if anyone has any suggestions as to things to avoid, the best way to
do this, baking times, etc. that would be greatly appreciated as well.

Thanks in advance for your help,

Megan
[email protected]


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