Hi Tushar,

We have battled with this problem as well and we achieved good results by
using very low RF power (25 W).We found out that if the PDMS was heated too
much,it would not become hydrophilic enough.Try with less power and less
time.

Good Luck

Virgínia Soares
----- Original Message -----
From: "Tushar Bansal" 
To: 
Sent: Thursday, March 25, 2004 9:30 PM
Subject: [mems-talk] Microchannel Hydrophilic problems


> Hello everyone,
> I am trying to make a PDMS channel using PR-1827 as a sacrificial layer.
>
> The height of the photoresist is 5 um, and then i spin a 5 um coat of PDMS
> on it. Etch away the PR and get a channel under the PDMS.
>
> The problem I am facing is that the channel doesn't become hydrophilic
> even after I put it in Oxygen Plasma. I have done 10 mins at 450 mT at
> 100W. The outside of the PDMS does become hydrophilic.
>
> Am I working with too small of a channel depth or am I overlooking
> something?? Do I need to treat it with Oxygen plasma for a few hours??
>
> Please advise, as I have been stuck with this problem for
> quite some time.
>
> Thanks in advance
> tushar
>
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