>     Do these metals require any kind of annealing treatments, and if so what
> are they for Ti, W, and Pt?

"require" for what? The contacts are ohmic right away, further anneals are
done to form the respective silicides or to phase-transform them. All just
to lower contact resistance.
"correct" process will depend on your junction depth.
best regards,
klaus
--
Klaus Beschorner
Metron Technology Europe, PVD (Eclipse) Process Manager
Drosselweg 6,71120 Grafenau,Germany. Tel +49-7033-45683