Dear all,

I am interested in electrostatic actuated micromechanical resonators. In case of
polysilicon resonators (comb-drive structure) often one can find a polysilicon
ground plane which is placed underneath the resonating structure.
As far as I know, the function of this electrode is to prevent pull-in of the
resonator  due to the applied DC polarization voltage.
Does this electrode also have other functions?


Stefan