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MEMSnet Home: MEMS-Talk: Anodic bonding and EDP etching services
Anodic bonding and EDP etching services
2004-03-29
Chen-Chuan Fan
Anodic bonding and EDP etching services
Chen-Chuan Fan
2004-03-29
Hi all,

I am looking for service providers for aligned bonding of Pyrex and Si
substrates, and for EDP etching of Si to release the structures in the p++ layer
(serving as etch stop). Please contact me directly at [email protected] if such
services are available, preferably in the Phoenix area.

Thanks,
Tom Fan


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