Hello,

I have small samples (1cm square) and try to spin-coat SU8 resist on it. I
apply my ressit with a pipette directly on the samples and then spin-coat. I
also try to spin slowly when appling the resist. These two ways produce big
edge bead. How do you spin-coat SU8? How big are your samples?

Best regards,

Patrick Poissant
___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K 2R1
   CANADA
   [email protected]
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new - Albert
Einstein