Patrick,

If you're handy in the workshop and you are able to/allowed to modify
your spin coater's chuck, you could make a new chuck out metal (e.g.,
Dural) and mill in a square of the appropriate size and depth. Just
leaving it a bit proud (say, 0.1 mm) gives good results and minimises
the edge bead.

Chris

On Tuesday, March 30, 2004, at 02:11 AM, Patrick Poissant wrote:

> Hello,
>
> I have small samples (1cm square) and try to spin-coat SU8 resist on
> it. I
> apply my ressit with a pipette directly on the samples and then
> spin-coat. I
> also try to spin slowly when appling the resist. These two ways
> produce big
> edge bead. How do you spin-coat SU8? How big are your samples?
>
> Best regards,
>
> Patrick Poissant