Hi Mike,
Try wet etching the residual Indium in HCl(aq), or
use an H2/Ar2 RIE Plasma etch.

Hopefully, the above will a have a minimum effect on Cu -
copper has a low sputter yield.


Regards,

Philip Lau

----- Original Message -----
From: "Christopher Blanford" 
To: "General MEMS discussion" 
Cc: "Michael Wulf" ; "Michael Wulf"

Sent: Tuesday, March 30, 2004 9:13 PM
Subject: Re: [mems-talk] Indium solvent


> Dear Mike
>
> Couldn't you use a heat gun and a solder sucker to remove the rest of
> the indium? The melting point is 156.6 C, lower than tin-lead solders.
> Oil baths can go above that temperature if need be (e.g., oil for
> chips/fries usually is at 190 C). It will depend on how temperature
> sensitive your component is, though.
>
> Chris
>
> On Tuesday, March 30, 2004, at 05:42 PM, Michael Wulf wrote:
>
> > Hi,
> >
> > I am looking for an acid to remove some indium leftovers from a copper
> > flange. The indium was used for a vacuum seal, but removing the last
> > pieces mechanically would damage the system. Does anybody know of a
> > way to
> > chemically remove the indium selective over the copper ? If so what
> > would
> > be a supplier of that solution ?
> >
> > thanks
> > mike
>
> --
> Christopher F. Blanford
> Inorganic Chemistry Laboratory, South Parks Road, Oxford, OX1 3QR, UK
> Phone: +44 (0)1865 282603; Fax: +44 (0)1865 272690
> PGP keyID: 8D830BC9  http://pgp.mit.edu/
>
>
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