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MEMSnet Home: MEMS-Talk: does HF attack Ni or PZT
does HF attack Ni or PZT
2004-04-01
Qing Yao
does HF attack Ni or PZT
Qing Yao
2004-04-01
Hi,


I was wondering if HF attacks Nickel or PZT (Lead Zirconate Titanate). If it
does, what is the etch rate? Thanks!



Best Regards,


Qing Yao
___________________
M&IE @ UIUC



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