Peter,

MIF327 or MIF400 diluted will etch your Al without effecting PMMA and SiO2 - it
will be slow for a wet etch.

Greg Miller
KVH Industries
Email: [email protected]


-----Original Message-----
From: Zannitto, Peter J. [mailto:[email protected]]
Sent: Thursday, April 01, 2004 11:23 PM
To: [email protected]
Subject: [mems-talk] wet etch of Al



My structure consists of 250nm PMMA / 700nm of Al / 1um SiO2.

I have done e-beam lith on the PMMA layer and developed.  I now want to etch the
Al down to the SiO2.

Can anyone recommend an Al etchant that should be used in these circumstances?
The selectivity of the etch between the Al and the PMMA should be as high as
possible.
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