Toni sounds like a manually loaded plasma system, which is a commercially
available thing.  If you search on that my guess is you will find something
off the shelf.  Gary

Gary Hillman
Service Support Specialties, Inc.
9 Mars Court
PO Box 365
Montville, NJ 07045
973-263-0640
973-263-8888.



-----Original Message-----
From:   Yuzhu Li [SMTP:[email protected]]
Sent:   Wednesday, March 31, 2004 1:09 PM
To:     [email protected]
Subject:        [mems-talk] custumily build machine needed

it has a vaccum chamber with a wafer holder, the wafer holder is
connected to a high voltage pulser. gas will feed in the chamber and
the HV pulse will ionize the gas. Anyone will accept such a R&D PO?
Tony


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