Re: what am i doing wrong with ti adhesion layers?
Li Zhihong
1998-11-10
May be you can try to use thinker Ti layer and sputtered Au.
At 98/10/20 09:22:00 AM, you wrote:
>What am i doing wrong with Ti adhesion layers? I am thermally
>evaporating 50-100nm Au films on glass substrates with 2-5nm Ti
adhesion
>layers. After a few days, the films turn from reflective Au to
a frosty
>white color. Is this titanium oxidation or some other diffusion
process
>I am unfamiliar with?
>
>Thanks
>
>L. Andrew Lyon, Assistant Professor
>School of Chemistry and Biochemistry
>Georgia Institute of Technology
>Atlanta, GA 30332
>
>[email protected]
>
>
>
______________________________________
Zhihong Li,
Institute of Microelectronics, Peking University
Beijing 100871, China