Hi
You can search the article by the title "mechanical properties of MEMS
material".
I have some articles that I can send for you if you couldn't find.
Mahdi Bagheri

"M. Arefin Anwar"  wrote:
Hi

I am looking for complete properties of Polysilicon 1 and Aluminum to run my
simulation in ansys because I am getting weird result in the simulation. I am
looking forward to hear.

Thanks
Arefin


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