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MEMSnet Home: MEMS-Talk: Thin film stress
Thin film stress
2004-04-07
Drake, J (John)
Thin film stress
Drake, J (John)
2004-04-07
Does anyone know a 'rule of thumb' for determining if a thin film will crack
when deposited on a material with an unmatched TCE and then heated? e.g.
silicon nitride on silicon. I thought it was something to do with the
respective youngs modulus and TCE


JD



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