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MEMSnet Home: MEMS-Talk: oxide absorbing moisture after doping
oxide absorbing moisture after doping
2004-04-07
Sue Carter
oxide absorbing moisture after doping
Sue Carter
2004-04-07
Suzanne;

Are you doing a soft bake anytime after doping? It sounds like the
temperature is to high causing the solvents to boil off leaving a pinhole
from the bubble.

Sue
[email protected]


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