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MEMSnet Home: MEMS-Talk: wet etch of Al
wet etch of Al
2004-04-02
Zannitto, Peter J.
2004-04-02
Xiaoshan Zhu
2004-04-15
hare krishna
2004-04-02
Greg Miller
2004-04-02
William Lanford-Crick
2004-04-09
[email protected]
wet etch of Al
[email protected]
2004-04-09
Try KOH at 60°C
>
> My structure consists of 250nm PMMA / 700nm of Al / 1um SiO2.
>
> I have done e-beam lith on the PMMA layer and developed.  I now
want to etch the Al down
to the SiO2.
>
> Can anyone recommend an Al etchant that should be used in these
circumstances?  The
selectivity of the etch between the Al and the PMMA should be as high
as possible.
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