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MEMSnet Home: MEMS-Talk: SU-8 recording at 400nm
SU-8 recording at 400nm
2004-04-12
suitto kk
2004-04-12
Christopher F. Blanford
2004-04-12
Jacques Jonsmann
SU-8 recording at 400nm
suitto kk
2004-04-12
Dear Mems-talk,
I would like to ask if anyone have experiences with
recording using laser lithography at 400nm? Although the
SU-8 specs says absorbance starts below 370nm, we found
that the recorded structures become a featureless mass
after PEB and development. Would be great if someone can
offer some insight. Thanks for reading.

suitto


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