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MEMSnet Home: MEMS-Talk: microcrack after deposition
microcrack after deposition
2004-04-13
Yilei Zhang
2004-04-14
Michael D Martin
microcrack after deposition
Yilei Zhang
2004-04-13
Hi members:
I tried to do a lift-off process. after deposition 300nm Cr, I always found
micro-cracks
around the edge and corners. what is the
reason for such microcracks? the intrinsic stress? How to avoid it? thanks.

Regards,
Yilei Zhang







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