Hi,
We had a similar wrinkling problem. After exposure of the SU-8 and PEB
we deposit
1 or 2 microns of silver onto the SU-8 by evaporation. This Ag-layer is
patterned using
Clariant AZ1512 HS and wet etching.
During the softbake of this resist (even at 60 deg C !) we observed
wrinkling of the surface
in the non-exposed areas of the SU-8. We were able to avoid it by
extending the PEB of the
SU-8. For a layer thickness of 5 microns we bake the SU-8 approx. 20
hours at 60 deg C on a hotplate
prior to the deposition of the metal. Consequently we assume that the
wrinkling is caused by solvent
which is still contained in the SU-8 layer.
Regards
Peter Svasek
Vienna University of Technology
Institute of Sensor and Actuatorsystems
Gusshausstrasse 27-29/366
A-1040 Vienna
Austria
Tel. +43-1-58801-36643
Fax +43-1-58801-36699
>>>>>
>>>>>
>>Hello all,
>>
>> We met a SU-8 wrinkle problem and would like to
>>hear any suggestion. The process is to pattern gold on
>>the un-exposed SU-8 resist. We first piranha etched
>>the glass slides and baked it for 1hr@200C. The
>>spun-on SU-8 resist looked good after soft bake. Then
>>gold was sputtered onto the resist, and it was
>>patterned by using Shipley 1813 positive resist. After
>>that, the gold was etched in Transene gold etchant TFA
>>(a complex of KI/I2), rinsed in DI water, baked at 90C
>>for 30 mins. The wrinkles showed up during the baking.
>>Does anyone have the same experience? Any suggestion
>>welcomed.
>>
>>
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