Hi,

I think you should write the film thickness and deposition conditions.

If your film is dense and has no pin hole,....
1.Poor coverage:
 The ferroelectric film may have discontinuity at the edge of the bottom
electrode.
2. Titanium diffusion:
 Ti can easily diffuse into the titanate film.  We had a lot of short capacitor
problems when
depositting (Ba,Sr)TiO3 on Ti electrode. Of course, it depends on the thickness
of the Pt.

> Subject: [mems-talk] Short circuit capasitor thin films
> Message: 5
>
> Dear all,
>
> I try to deposit the ferroelectric thin films (bismuth
> titanate)on substrates Si/SiO2/Ti/Pt and Si/SiO2/RuO2 by RF
> magnetron sputtering. But both the samples facing the problem
> of "short circuit capasitor" after the deposition of top
> electrode. May i know what are the possible reasons of the problem?
>
> Thanks!
>
> from,
> Chong Cheong Wei