Sri,

Have you tried a vapor coating of wax?

Jeff

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf
Of pskoundinya
Sent: Friday, April 16, 2004 4:24 PM
To: [email protected]
Subject: [mems-talk] Surface protection during CMP

Hi,
When I am polishing one side of a 4-inch Silicon wafer, the other side
of the wafer is ending up with slurry deposits after each polishing
cycle. I am thinking about protecting the other side of the wafer from
slurry deposits and stains by covering it with some adhesive tape that
can be peeled off after entire wafer polishing. This would protect
structures from slurry deposits. Does anyone know of any standard
covering tapes that industry uses to protect the wafer surfaces during
polishing? I would appreciate any suggestions.

Thanks,
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