A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: microchanels anodic bonding
Re: microchanels anodic bonding
2004-04-20
Emeline MERY
Re: microchanels anodic bonding
Emeline MERY
2004-04-20
Hello,

I usually do bonding of micro chanels etch in silicon wafers with glass
corning #7740 (wich  contains  sodium ions).  Temperature must be
between 300 and 400°C during experiment. I apply a voltage of 1000V
between the two electrodes and a little pressure is necessary to
maintain the stack.

sincerely


--
Emeline MERY
Doctorante
Laboratoire de Physique de la Matière (LPM)
UMR CNRS 5511
INSA de Lyon
7 avenue Jean Capelle, bât. Blaise Pascal
69621 VILLEURBANNE CEDEX
Tél. : (33) 4 72 43 87 95
Fax : (33) 4 72 43 60 82




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
The Branford Group
Mentor Graphics Corporation
Harrick Plasma, Inc.