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MEMSnet Home: MEMS-Talk: Surface protection during CMP
Surface protection during CMP
2004-04-16
pskoundinya
2004-04-19
Jeff Simkins [simkinjr]
2004-04-21
[email protected]
Surface protection during CMP
[email protected]
2004-04-21
Sri,

There are several suppliers for the tape you're looking for.  GDSI comes to
mind.  You can also spincoat the wafer with 1 mil of resist to protect its
surface.

Good luck.

- Jim

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