Hi,

Regarding to the short circuit problem of the thin
films capcitor Si/SiO2/RuO2/Bi3Ti4O12 and
Si/SiO2/Ti/Pt/Bi3Ti4O12, which the Pt, RuO2 and
Bi3Ti4O12 prepared by RF magnetron sputtering.

I prepare the samples in the condition without
cleanroom facilities. Is that this condition will
result in the short circuits problem? The room
humidity is around 60 %.

Thanks!

from,
Chong





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