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News	MEMSnet Home: MEMS-Talk: Thickness Measurements of Silicon Membrane Thickness Measurements of Silicon Membrane 2004-04-21 Stas Lokshin 2004-04-21 Marc Straub 2004-04-21 Karl Cazzini Thickness Measurements of Silicon Membrane Karl Cazzini 2004-04-21 A broad band visible / IR scan with a spectrophotometer will also give you the thickness. The membrane will act as an etalon and give you a spectrum which is modulated by alternating maxima / minima due to interference within the Si film. Plotting the wavelength of adjacent maxima and minima (y-abcissa) versus and arbitrarily assigned integer corresponding to each maxima and minima, will yield a straight line of slope 1/4nd, where n is the refractvie index and d is the thickness of the film. The methos only works well over spectral intervals where n is relatively constant (i.e, there is relatively constant optical absorbtion). The refractive index n, can be obtained from the literature. Other techniques which may work for you are ultrasonic velocimetry, elipsometry etc. _____ From: [email protected] [mailto:[email protected]] On Behalf Of Stas Lokshin Sent: Wednesday, April 21, 2004 4:26 AM To: [email protected] Subject: [mems-talk] Thickness Measurements of Silicon Membrane Attn: To all it may concern Dear Sirs, Thickness Measurements of Silicon Membrane We are here in Microsense, Israel are dealing with medical application. One of the basic parts of our system is Silicon membrane with following parameters. On the recent part of our development we need to measure the membrane thickness. We would be very obliged if you could advise us any type of measurements which can be done for this purposes. Yours faithfully, Stanislav Lokchine, Microsense CardioVascular Ltd Phone: +972-3-644-84-48 ext. 112 Fax: +972-3-644-45-69 ÿØÿàJFIF``ÿþ Software: Microsoft OfficeÿÛC #%$""!&+7/&)4)!"0A149;>>>%.DIC;ÿÛC ;("(;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;ÿÀè\"ÿÄ ÿÄO !UÑ1AQTatÒ"6q¡Á27BRS±²#$5Cb34rs¢³ácÂðÿÄ ÿÄ4!1Q¡Raáð"Abq2±ÁÑ34B#ÿÝ(ÿÚ ?ì ?ÿÐì +R©[<¶w¬S$g{3z .Õm)§´TJäfµò"¶jt_¥¢Êä½¾Þ³4´SÊªaW^Ë ÓM7Ðëþ6¹öJÈùÞ²9Ub¦ÑVéEöé3´º¢ºoywv\|©Õ5/vzðp±so¡nç"Y;U#$2U¹ö8ÛnÌ®_ Ô"4¶DûÛý1Á:JBø£NZ ±ÌT·j[GâN"ÒR>Ê®X-ý÷ôøEíµLL¾K0ÿÑì +_ÜfØR¾¥èõDVô£?wÚ§¿]tuÕ¹ ·3ÚSOÿÊHX µì¨ºf¶'2ÝwUEüS,uÕ ý²1É§B.ò£=3xs»«ù)É{j··Eìµ¿Ó+VW7¤¨tn]Y¨ÕNÝ+{}Æ -{ÏLÞWºlôTñÒdµÐ¶8x:wÆÄFçðETN»fôýâ/óMQoo¹}¥Qß<ejõ%yöJøbàÑí¯æ±[ô J%Û¥4S gw-¦\|¼#$j¯ÑÐ: ÎÏ}d2ðyÑÄæ-UºSÀ\|H+ßÞïíõµ±,O{Ññº5DtnO¤½ ÷¿UV$¤RA,r]©"'Ò·M¬ªb¨Ã½eÕYîLÙ<ÔÓ¡X·Óì½T~®¯s©¡Ê±Èçªø¢X\|W&0²ÌÆÿÏÝö:þ ÉÁRÎøÕÖI75tÚú]{}Ç©+²º8 w3ôø<Û5{êfÐMë\+asóHårªéÒ¶DÒ{¬£¢lä¥§z"Y éÇ}öOÌ^l¸y½ÿÒk ¯b9Xæ§èº×O lÏ_ ³Íj¥íäKþ&XXøác"Èæ¥ê'¨=fcGfÑÈ¶¾TTüP´ÞÌiËÅ÷]ÒEY%+åtÍlm ûgiUKhDì#T%WÌ®Zä985cÍFæ¥ô.Þæt§«s¥¨WE CØb6îkQVëtKô©_^l®àRÆë[=ÊÕbýÈ·ü Ûchª"«Å·L°9¯72EªÔ³×ö½§ÙeÖI^Ö1:\å²!æ)ic®W$mFÝzÌ¥¾L&Ù¼á¯¤¨¦9 kæµ×R@¢m}$é658@ç#½hÒ«÷©½¦. 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