Hi MEMS community,
I  want to etch 3-5um deep and 5-10 um wide
trench on glass, does anyone have any experience with
that? If using RIE etch, does anyone know what is the
etch rate of it compare to the PRs say, shipley or AZ.
Is metal mask a choice?
Thanks
lisen


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Lisen wang
Graduate student
BME , University of California Irvine.




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