Hi Gavin,

We've been struggling with SU-8 ourselves.And  came to the conclusion,after
also much researching on the web,that it is better to forget about the
pipette.Su-8 just gets stuck in there.
Pour direcly from the bottle.
You can also check the following site:
http://aveclafaux.freeservers.com/SU-8.html

Good luck!
Virginia Soares
INESC - Microsistemas e Nanotecnologias
R.Alves Redol,9
1000-029 LISBOA
PORTUGAL
email:[email protected]
Tel: +351 21 3100 300 ext.2504
Fax :+351 21 314 58 43
----- Original Message -----
From: "Gavin Wu" 
To: 
Sent: Wednesday, April 21, 2004 5:45 PM
Subject: [mems-talk] SU-8 spin coat


> Dear all,
>
> I am a novice on using SU-8. I've ordered MicroChem 2025 and tried to
> spin-coat a 2" wafer. Since SU-8 is really thick and sticky, I applied it
onto
> the wafer surface before spinning with a small beaker instead of a
pipette. I
> also slowed down the accelerating ramp of the spinning chuck. But I've
never
> been able to get a uniform layer or smooth surface without streaks. I know
the
> problem might be in the bubbles generated when applying the SU-8, which is
> kinda unavoidable. Anyone has a better idea on the *tool* (I mean beakers,
> pipettes, etc) for applying SU-8? Or anyone know the secret of getting a
> uniform layer?
>
> I guess the answer could be somewhere in the archive. But I just need an
> answer really quickly. Thanks very much.
>
> Gavin
>
>
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