andrew lyon wrote:
>
> What am i doing wrong with Ti adhesion layers?  I am thermally
> evaporating 50-100nm Au films on glass substrates with 2-5nm Ti adhesion
> layers.  After a few days, the films turn from reflective Au to a frosty
> white color.  Is this titanium oxidation or some other diffusion process
> I am unfamiliar with?
>
> Thanks
>
> L. Andrew Lyon, Assistant Professor
> School of Chemistry and Biochemistry
> Georgia Institute of Technology
> Atlanta, GA  30332
>
> [email protected]
>
>
People in thin film ceramic industry uses TiW as adhesion layer
for gold.  At elevated temperature, Ti is known to diffuse thru
gold.

Nowicki, Harris, M Nicolet, and Mitchel, Thin Solid Films, Vol 53,
pp.195-205, 1978

R. Nowicki, "Comparison of RF sputtered titanium-tungsten/gold with
DC magnetron sputtered tungsten/gold on silicon," Solid State
Technology,
pp. 127-130, Jun, 1982.

Try oxidize the Ti before your gold deposition.  Try also an Auger
analysis
and see want you have on the surface.

Good luck!
--
TK Wang
Hewlett Packard Company
2850 Centerville Road
Wilmington, DE 19808