Hi,
Check your sample carefully with microscope.
Any dust or particle on your sample can cause the short circuit.

I recommend you to try Pt-only electrode.
If you have no problem in that sample, possibly your bottom electrode is the
problem.

> Regarding to the short circuit problem of the thin films
> capcitor Si/SiO2/RuO2/Bi3Ti4O12 and Si/SiO2/Ti/Pt/Bi3Ti4O12,
> which the Pt, RuO2 and
> Bi3Ti4O12 prepared by RF magnetron sputtering.
>
> I prepare the samples in the condition without cleanroom
> facilities. Is that this condition will result in the short
> circuits problem? The room humidity is around 60 %.
>
> Thanks!
>
> from,
> Chong