Hi,
I wonder did you check the microstructure and compositions of BTO
ferroelecric films?

The short phenomena of dielectric films might be originated from the open
structure ( very rough and pores..) and metallic path along the thickness
due to the underlying metallic component diffusion and film itself
properties such as low dielectric breakdown strength, an so on.

I think, at first, it is better to check the microstructure and compositions
about diffused species,.....


----- Original Message -----
From: "Tetsuya Kishino" 
To: 
Sent: Thursday, April 22, 2004 5:55 PM
Subject: [mems-talk] RE: Short circuits thin films capacitors2


> Hi,
> Check your sample carefully with microscope.
> Any dust or particle on your sample can cause the short circuit.
>
> I recommend you to try Pt-only electrode.
> If you have no problem in that sample, possibly your bottom electrode is
the problem.
>
> > Regarding to the short circuit problem of the thin films
> > capcitor Si/SiO2/RuO2/Bi3Ti4O12 and Si/SiO2/Ti/Pt/Bi3Ti4O12,
> > which the Pt, RuO2 and
> > Bi3Ti4O12 prepared by RF magnetron sputtering.
> >
> > I prepare the samples in the condition without cleanroom
> > facilities. Is that this condition will result in the short
> > circuits problem? The room humidity is around 60 %.
> >
> > Thanks!
> >
> > from,
> > Chong
>
>
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