Hello MEMS group

I was wondering if there is any photosensitive glass (similar to FOTURAN)
that has a TCE close to that of Silicon, so that the two could be bonded
together anodically.

I need to bond structured glass with silicon, but find wet etch of Pyrex
glass rather difficult. I am trying to avoid the possibility of
ultrasonic drilling of pyrex, and would be happy to buy photosensitive
glass that is also bondable with silicon.

************************************************************************
Thank You,
Sriram
MEMS Development and Engg.,
Bharat Electronics
Bangalore, India