We tested evaporated copper in 30% KOH at 80 C.
Rather than etching, it got thicker, indicating that some reaction was
occuring.

Remember that many etch rates have been tabulated and are available online;
see the archives for more info.

    --Kirt Williams

----- Original Message -----
From: "Tan, Chuan Seng" 
To: 
Sent: Wednesday, April 28, 2004 9:42 PM
Subject: [mems-talk] Does KOH or TMAH attack Cu ?


> Hello !
>
> Does anyone know if Si etchants like TMAH or KOH attack Cu ? If they do,
at what rate ?
>
> MANY THANKS !!
>
> CSTan
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