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MEMSnet Home: MEMS-Talk: 1 micron holes in wafer.
1 micron holes in wafer.
2004-04-29
Ananth Krishnan
2004-04-30
Jesse Fowler
1 micron holes in wafer.
Ananth Krishnan
2004-04-29
Hello,

      I am a student in bioengineering. Could anyone
guide me a good way to etch cylindrical holes
(vertical side walls) with critical dimension of
1-micron on silicon wafer? Higher the pore density the
better (without overlapping pores).

      Eagerly waiting for any guidance.

Sincerely,

Andy







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