Hello,

I'm Maximiliano Fischer. I work in MEMS in Argentina. My thesis work in
Purdue University, Indiana, USA was to create a mechanical test for a
metallic membrane, the only moving part of a Raytheon's RF MEMS Switch.
Regarding mechanical issues, I can reccomend looking for these authors:

William Sharpe Jr., PhD (for tensile tests in metals and polysilicon),
Stephen Senturia, PhD (for his famous M-Test, which will be of great
interest to you since it actuates a fixed-fixed beam electrostatically),
Horacio D. Espinosa, PhD (with whom I worked on mechanical characterization)

I hope to be of any help. Regards!

Maximiliano