Solvent for complete removal of photoresist MEGAPOSIT
SPR 955 CM Series
Parijat Bhatnagar
2004-05-03
Can anybody suggest me a solvent for complete and effective removal of hard
baked, plasma treated photoresist "MEGAPOSIT SPR 955 CM Series" but still
leaving the HMDS primer monolayer intact on the Silicon Oxide surface. I
tried Acetone with Ultrasonic treatment for 5 minutes but it still left 10
nm of resist layer.
Sincerely,
Pari.