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MEMSnet Home: MEMS-Talk: shear modulus of LPCVD silicon nitride
shear modulus of LPCVD silicon nitride
2004-05-03
arthur beyder
shear modulus of LPCVD silicon nitride
arthur beyder
2004-05-03
Does anyone have a reference for shear modulus of LPCVD silicon nitride?

Thank you,
Arthur Beyder
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