Hi Sehran
I am using diomond blades for cutting PZT disks to size of
0.15mm thickness. I use super-glue for bonding PZT on metal or glass
surface. The RPM can vary between 150-200RPM but at final stage of cutting
reduce the RPM to 70-100. Always use rough glass or metal surface for
better bonding. Use fresh super-glue.
Gurvinder
_______________________________________________________________________________
Gurvinderjit Singh Ahluwalia Tel: +91-0731-488656
Laser Materials Division Fax: +91-0731-488650
Centre for Advanced Technology email: [email protected]
Indore - 452 013 INDIA
_______________________________________________________________________________
>
> >Hi All,
> >
> >For an ultrasonic transducer I need to dice 0.5mm thick PZT plates. We
> >have K-S 7100 dicing saw.
> >I used to partially cut PZT (less than 0.5mm) using basically a silicon
> >blade (S1235) at 0.5 inch/sec cutting speed, smoothly without any
> >problem.
> >Now I am trying to cut all the way through PZT bonded on a silicon die
> >(using super glue). So I am after slightly cutting into silicon. The
> >problem, however is that diced PZT pieces do not remain intact, and
> >gets detached from silicon.
> >The problem I think is mostly due to weakness of the bond between PZT
> >and silicon.
> >
> >On the other hand, I am still wondering if I am cutting too fast and
> >shearing the pieces more than enough. I appreciate if anyone can share
> >his/her experience on this issue or recommend me a suitable dicing
> >recipe (blade type, cutting speed and RPM speed of the blade) for PZT?
> >
> >Thanks
> >
> >Serhan Ardanuc
> >Cornell University
> >
> >_________________________________________________________________
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> >