Dear Christian Antonio,

I got 240 um layer by double coating of SU8-2025, not very easy to
control, but better than using 2150. The exposure time depends on your UV
intensity. I used 50 seconds with UV intensity 20mJ/cm^2.

Best


X.Z. Niu

Department of Mechanical Engineering
The Hong Kong University of Science & Technology
Clear Water Bay, Kowloon, Hong Kong


> Hello All,
>
> I was wondering whether anyone can help me.  I am currently processing
> 260micron  SU8-2100 layers on Silicon substrates.  I have tried the
> suggested procedure by  microchem but did not get the results I wanted.
> I have also gotten procedures from  other groups in the literature but
> many are quite different to each other.  I am especially  concerned
> about the exposure times which varies a lot from different groups.  Has
> anyone had experience in processing layers this thick with good results
> and could share  their procedure or experiences.
>
> Any input will be greatly appreciated.
>
> Thank you.
>
> Christian Antonio
> Research Student
> Industrial Research Institute Swinburne,
> Australia.
>
>
>
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