Check out coverslips for glass sides used by chemistry.  They are typically
140 microns thick.

They may be able to do the job.

Shekhar Bhansali

At 09:54 AM 10/26/98 -0800, you wrote:
>
>Hello, Everybody:
>
>      I'm a graduate student at University of Washington working on
>micropumps. I'm looking for thin pyrex glass sheet (around 150 micron)
>to bond on silicon wafer. I found a vendor, but they charge unreason price
>and we can't afford it. I'm just wondering if anyone knows a good vendor
>that provedids that thin pyrex glass? Thanks a lot.
>
>Hang  Tian
>
>e-mail: [email protected]
>
>
>
>
Shekhar Bhansali, Ph.D.
Center for Microelectronic Sensors and MEMS
Department of Electrical & Computer Engineering and Computer Science
University of Cincinnati
Cincinnati OH 45221-0030
Phone: (513) 556 0903  Fax: (513) 556 7326